METHOD OF MANUFACTURING WIRING BOARD
PROBLEM TO BE SOLVED: To provide a method of manufacturing a wiring board in which a cavity having a plurality of connection pad portions arranged in a staircase pattern on a side is easily formed without any trouble. SOLUTION: The method of manufacturing the wiring board includes the processes of:...
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Main Author | |
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Format | Patent |
Language | English |
Published |
29.10.2009
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a wiring board in which a cavity having a plurality of connection pad portions arranged in a staircase pattern on a side is easily formed without any trouble. SOLUTION: The method of manufacturing the wiring board includes the processes of: forming a multilayer wiring layer having the connection pads P1, P2, P3 disposed on a substrate 10 while shifting in position more outward toward an upper-layer side; forming a mask 40 provided with an opening portion 40a whose side face is in a staircase pattern on the multilayer wiring layer; and forming the cavity C having the plurality of connection pads P1, P2, P3 disposed in the staircase pattern on the side by exposing the connection pads P1, P2, P3 of the multilayer wiring layer by processing insulating layers 34, 32, 30 together at a time through the opening portion 40a of the mask 40 by an anisotropic processing means (wet blast). COPYRIGHT: (C)2010,JPO&INPIT |
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Bibliography: | Application Number: JP20080094791 |