THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYSIS METHOD USING SCANNING PROBE MICROSCOPE, THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYZER AND THREE-DIMENSIONAL MEMBRANE STRUCTURE MEASURING METHOD OF SCANNING PROBE MICROSCOPE

• Main Authors: WATANABE MASAHIRO, MORIMOTO TAKASHI, KURENUMA TORU, EDAMURA MANABU, BABA SHUICHI, KENBO YUKIO, KURODA HIROSHI
• Format: Patent
• Language: English
• Published: 29.10.2009
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

PROBLEM TO BE SOLVED: To provide a three-dimensional membrane structure measuring method of a scanning probe microscope capable of measuring the surface shapes of respective layers at every manufacturing process in a manufacturing process of a semiconductor device having a multilayered structure to...