THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYSIS METHOD USING SCANNING PROBE MICROSCOPE, THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYZER AND THREE-DIMENSIONAL MEMBRANE STRUCTURE MEASURING METHOD OF SCANNING PROBE MICROSCOPE

• Main Authors: WATANABE MASAHIRO, MORIMOTO TAKASHI, KURENUMA TORU, EDAMURA MANABU, BABA SHUICHI, KENBO YUKIO, KURODA HIROSHI
• Format: Patent
• Language: English
• Published: 29.10.2009
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

PROBLEM TO BE SOLVED: To provide a three-dimensional membrane structure measuring method of a scanning probe microscope capable of measuring the surface shapes of respective layers at every manufacturing process in a manufacturing process of a semiconductor device having a multilayered structure to synthesize the measurement results and capable of analyzing and evaluating those measuring results using the data of a multilayer. SOLUTION: The three-dimensional membrane structure analysis method using the scanning probe microscope has a measuring step (S12 and S14) for measuring the surface shapes of a plurality of arbitrary layers in a structure formed of a plurality of layers at each time when each of a plurality of the arbitrary layers is formed (steps S11 and S13) by an atomic force microscope or the like and a measuring data synthesizing step (step S16) for aligning the measuring data related to the surface shape of a certain layer and the measuring data related to the surface shape of the second layer of another layer in relation to the same two-dimensional region on a layer surface and three-dimensionally arranging the measuring data on the basis of an interlayer distance to form a three-dimensional membrane structure. COPYRIGHT: (C)2010,JPO&INPIT