ELECTROMAGNETIC ENERGY STORAGE OR RELEASE DEVICE USING SPIN DYNAMICS, AND METHOD OF MANUFACTURING THE SAME

• Main Authors: OKUDA SANEHIRO, EDO MASAHARU
• Format: Patent
• Language: English
• Published: 22.10.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRICITY; INDUCTANCES; MAGNETS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; TRANSFORMERS

PROBLEM TO BE SOLVED: To provide: an electromagnetic energy storage or release device miniaturizing an electromotive force element which has relied on an inductor, a transformer or the like in the past, reducing power consumption thereof, drastically miniaturizing a power circuit of a portable apparatus or the like, and using spin dynamics; and a method of manufacturing the device. SOLUTION: For this device, a lower electrode layer is formed on a silicon substrate, thereafter a Co50Fe film of 50 nm is formed as a magnetization fixed layer 1, and Cu of 6 nm as a nonmagnetic intermediate layer 2 and a Co50Fe film as a magnetization free layer 3 of 2.5 nm are formed thereon. The magnetization fixed layer 1 and the magnetization free layer 3 are heat-treated in a magnetic field after the formation to impart magnetization anisotropy thereto. Negative resist is applied thereto to form a minute mask by electron beam lithography. Thereafter, a laminate film is processed by ion milling to satisfy w=100 nm and l=100 nm. After forming an insulating film, the resist is removed, and an upper electrode layer is made. A coil 4 is installed in an arrangement parallel to a magnetization easy axis of the magnetization free layer 3. COPYRIGHT: (C)2010,JPO&INPIT