LIQUID JET HEAD, LIQUID JET APPARATUS, AND PIEZOELECTRIC ELEMENT

PROBLEM TO BE SOLVED: To provide a liquid jet head and a liquid jet apparatus which can prevent cracking of a piezoelectric layer incident to driving of a piezoelectric element, and to provide the piezoelectric element. SOLUTION: A liquid jet head comprises the piezoelectric element having the lower...

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Bibliographic Details
Main Author KURIKI AKIRA
Format Patent
LanguageEnglish
Published 01.10.2009
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
ELECTRICITY
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:PROBLEM TO BE SOLVED: To provide a liquid jet head and a liquid jet apparatus which can prevent cracking of a piezoelectric layer incident to driving of a piezoelectric element, and to provide the piezoelectric element. SOLUTION: A liquid jet head comprises the piezoelectric element having the lower electrode provided on a channel formation substrate having a pressure generation chamber communicating with a nozzle for jetting a liquid droplet, a piezoelectric layer formed on the lower electrode, and the upper electrode formed on the piezoelectric layer, wherein the piezoelectric layer consists of a plurality of layers of ferroelectric film containing lead (Pb), zirconium (Zr) and titanium (Ti) formed on the lower electrode, and a region having maximum concentration of titanium to zirconium of 80% or more is provided on the boundary of a first layer of ferroelectric film closest to the lower electrode and a second layer of ferroelectric film formed thereon. COPYRIGHT: (C)2010,JPO&INPIT
Bibliography:Application Number: JP20080064966