SURFACE TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a surface treatment apparatus which can suppress impairs of members or the like constituting the apparatus, and a processing unevenness of an object to be treated. SOLUTION: The surface treatment apparatus 100 includes a diluent gas supply unit 1 supplying a diluent...

Full description

Saved in:
Bibliographic Details
Main Authors MORI KAZUTAKA, TANAKA NORIYUKI, TAKEBAYASHI HITOSHI, HIRAIWA JIRO, FUJITA ICHIRO, YOSHIMOTO OSAMU, SASAKI HIROYOSHI
Format Patent
LanguageEnglish
Published 24.09.2009
Subjects
AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CHEMISTRY
COMPOSITIONS BASED THEREON
GENERAL PROCESSES OF COMPOUNDING
METALLURGY
MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
ORGANIC MACROMOLECULAR COMPOUNDS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
THEIR PREPARATION OR CHEMICAL WORKING-UP
THEIR RELEVANT APPARATUS
TRANSPORTING
WORKING-UP
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To provide a surface treatment apparatus which can suppress impairs of members or the like constituting the apparatus, and a processing unevenness of an object to be treated. SOLUTION: The surface treatment apparatus 100 includes a diluent gas supply unit 1 supplying a diluent gas, a fluorine gas supply unit 2 supplying a fluorine gas, a mixer 5 mixing the diluent gas and the fluorine gas to produce a mixed gas, and a reactor vessel 6 contacting the object to be treated with the mixed gas, and is characterized by comprising further a heating means 8 heating the diluent gas. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20080056951