ELECTRON EMITTING ELEMENT

PROBLEM TO BE SOLVED: To provide an electron emitting element in which membrane thickness flatness of an insulation layer is superior, homogeneous electron emission is possible, and which has fine patterns. SOLUTION: The electron emitting element includes a cathode electrode layer on a substrate, an...

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Bibliographic Details
Main Authors KAMIOKA TAKENORI, MATSUBA SATOSHI, GOTO KAZUOKI
Format Patent
LanguageEnglish
Published 17.09.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide an electron emitting element in which membrane thickness flatness of an insulation layer is superior, homogeneous electron emission is possible, and which has fine patterns. SOLUTION: The electron emitting element includes a cathode electrode layer on a substrate, an insulation layer on which the patterns are formed by photolithography of photosensitive paste and calcination, and a gate electrode layer that are laminated in this order. The ratio of the largest membrane thickness dmax1of the insulation layer at the marginal part within the distance of 200% of the average membrane thickness of the entire insulation layer from the peripheral end of the insulation layer to the average membrane thickness daveof the insulation layer at the other part is 0.5≤dmax1/dave≤2. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20080054477