CHEMICAL SENSOR DEVICE, AND MATERIAL MEASURING DEVICE EQUIPPED WITH IT

• Main Authors: KAZAMA ATSUSHI, OKADA RYOJI, KOIDE AKIRA
• Format: Patent
• Language: English
• Published: 10.09.2009
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a chemical material measuring device which can reduce a cost of a conventional device while maintaining selectivity (resolution capability) to the same level as that of the device or higher. SOLUTION: This invented chemical sensor utilizes a variation in the resonance frequency of a vibrator when a molecule has been absorbed to or removed from the vibrator. In the sensor, a vibrator substrate composed of a plurality of vibrators different in desorption properties of chemical materials is laminated with a piezoelectric substrate which may be deformed if a voltage is superimposed. Thus the plurality of all vibrators constituting the vibrator substrate is simultaneously excited by the excitation of the vibrator substrate utilizing the deformation of the piezoelectric substrate when an AC voltage has been applied to the piezoelectric substrate. COPYRIGHT: (C)2009,JPO&INPIT