REPLICATION APPARATUS AND REPLICATION METHOD

PROBLEM TO BE SOLVED: To provide a replication apparatus and replication method which are suitable for replicating a plurality of multiple-patterned micro patterns. SOLUTION: The replication apparatus has a heating mechanism which heats pattern boundaries of multiple patterns, which allows the selec...

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Bibliographic Details
Main Author YAMADA YUMIKO
Format Patent
LanguageEnglish
Published 10.09.2009
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Summary:PROBLEM TO BE SOLVED: To provide a replication apparatus and replication method which are suitable for replicating a plurality of multiple-patterned micro patterns. SOLUTION: The replication apparatus has a heating mechanism which heats pattern boundaries of multiple patterns, which allows the selective crystallization of the pattern boundaries on the surface of a resin film where multiple patterns are duplicated and the replication of the multiple patterns in a state where the cut-assisting treatment is made on the surface to make cutting each of the patterns easier. Thus, a plurality of multiple-patterned micro patterns are appropriately replicated. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20080047374