ASHING METHOD, ASHING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
PROBLEM TO BE SOLVED: To provide an ashing method capable of suppressing a popping phenomenon, to provide an ashing apparatus, and to provide a method of manufacturing a semiconductor device. SOLUTION: In the ashing method, while irradiating a heating gas to a resist pattern 101 that is formed at th...
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Main Author | |
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Format | Patent |
Language | English |
Published |
20.08.2009
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide an ashing method capable of suppressing a popping phenomenon, to provide an ashing apparatus, and to provide a method of manufacturing a semiconductor device. SOLUTION: In the ashing method, while irradiating a heating gas to a resist pattern 101 that is formed at the upper part of a silicon substrate 100 and having an alteration layer 101b formed at the surface layer in an oxygen-containing atmosphere, the silicon substrate 100 is cooled down to the temperature lower than the heating gas to remove the resist pattern 101. COPYRIGHT: (C)2009,JPO&INPIT |
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Bibliography: | Application Number: JP20080027171 |