DIRECTIONAL COUPLER AND PLASMA GENERATOR USING THE SAME

• Main Authors: MATSUUCHI HIDETAKA, MASUDA SHIGERU, IWASAKI RYUICHI
• Format: Patent
• Language: English
• Published: 30.07.2009
• Subjects: BASIC ELECTRIC ELEMENTS; BASIC ELECTRONIC CIRCUITRY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; RESONATORS; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE; WAVEGUIDES

PROBLEM TO BE SOLVED: To provide a directional coupler that precisely allows microwaves propagating in a waveguide to diverge, and is miniaturized. SOLUTION: In the directional coupler, the difference between the sum L1+L2 of distance L1 between probes 83A, 83B and the path length L2 of a first transmission path of a microstrip line 82 including the projection length of the probe 83A, and the path length L3 of a second transmission path of the microstrip line 82 including the projection length of the probe 83B coincides with (2n-1)λ/2 (n: an integer, λ: the wavelength of microwaves), and the difference between the sum L1+L3 of the distance L1 and the path length L3 of the second transmission path and the path length L2 of the first transmission path does not coincide with (2n-1)λ/2. The probes 83A, 83B are guided to coupling length holes 84A, 84B having a linear shape extended in the width direction of the waveguide 80 for movement, and the electric field strength of the microwaves with which the probes 83A, 83B are in contact changes. COPYRIGHT: (C)2009,JPO&INPIT