METHOD OF FORMING PROTECTIVE FILM AND METHOD OF OBSERVING CROSS SECTION OF SAMPLE

PROBLEM TO BE SOLVED: To provide a method of forming a protective film capable of preventing a structural change during the formation of a protective film when precise cross section information in proximity of the surface of a liquid permeable material or a material susceptible to heat and ion impac...

Full description

Saved in:
Bibliographic Details
Main Authors SUZUKI TOMOKO, KAMISHIRO KAZUHIRO, SANKUBO TAKESHI, MOTOI YASUKO, YOKOI HIDETO
Format Patent
LanguageEnglish
Published 30.07.2009
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To provide a method of forming a protective film capable of preventing a structural change during the formation of a protective film when precise cross section information in proximity of the surface of a liquid permeable material or a material susceptible to heat and ion impact is obtained by FIB. SOLUTION: The method of forming a protective film forms a protective film covering the surface of an object to be processed used for processing a cross section by an FIB device by condensing and solidifying a gaseous material that is the raw material of the protective film. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20080005610