SEMICONDUCTOR-DEVICE TESTING APPARATUS AND SEMICONDUCTOR-DEVICE TESTING METHOD

PROBLEM TO BE SOLVED: To provide a semiconductor-device testing method for executing high-reliability determination of a non-defective product and a defective product of semiconductor devices. SOLUTION: The semiconductor-device testing method includes: an input step (402) for inputting measurement v...

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Bibliographic Details
Main Author FURUKAWA HIDEYUKI
Format Patent
LanguageEnglish
Published 23.07.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a semiconductor-device testing method for executing high-reliability determination of a non-defective product and a defective product of semiconductor devices. SOLUTION: The semiconductor-device testing method includes: an input step (402) for inputting measurement values of a plurality of semiconductor devices; an index-value calculation step (403) for calculating an average value of absolute values of differences between two measurement values different from each other in the plurality of measurement values; a standard-deviation calculation step for calculating a standard deviation of the plurality of measurement values; an effectiveness determination step (406) for determining effectiveness of determination on the basis of the index value and the standard deviation; and a non-defective product/defective product determination step (408) for outputting a determination result after executing determination of a non-defective product and a defective product of the plurality of semiconductor devices by using the standard deviation when determined that the determination is effective. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070341031