SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To suppress formation of a void as a connection defect caused by trapping of a gas in a connection layer by eliminating the need of working, such as, grooving on the reverse surface of a semiconductor element, even when a semiconductor is connected using a conductive adhesive p...

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Bibliographic Details
Main Authors IDETA GORO, KIM KEUNSOO, KIM DOSEOP, SUGANUMA KATSUAKI
Format Patent
LanguageEnglish
Published 23.07.2009
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Summary:PROBLEM TO BE SOLVED: To suppress formation of a void as a connection defect caused by trapping of a gas in a connection layer by eliminating the need of working, such as, grooving on the reverse surface of a semiconductor element, even when a semiconductor is connected using a conductive adhesive producing an extremely large amount of gas. SOLUTION: A connection layer for connecting the semiconductor element 1 and a base material 2c has a laminated structure of an air gap layer 13 and a bonding layer 7, and consequently, a gas can be dissipated efficiently d to the outside of the connection layer in a process of connection. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070339952