TEMPERATURE CONDITIONING SYSTEM

• Main Authors: NOBUO KIYOTO, HASHIGUCHI TAKUO
• Format: Patent
• Language: English
• Published: 23.07.2009
• Subjects: BLASTING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; HEATING; LIGHTING; LIQUEFACTION SOLIDIFICATION OF GASES; MANUFACTURE OR STORAGE OF ICE; MECHANICAL ENGINEERING; REFRIGERATION MACHINES, PLANTS OR SYSTEMS; REFRIGERATION OR COOLING; WEAPONS

PROBLEM TO BE SOLVED: To provide a temperature conditioning system capable of securing more higher temperature accuracy in temperature control in a clean chamber for a manufacturing device of a semiconductor, a liquid crystal, or the like. SOLUTION: The temperature conditioning system is equipped with a main duct 2 having an inlet 3 in a lower part and having an outlet 4 in an upper part side, a blower 5 arranged in the neighborhood of the outlet 4 in the main duct 2, a cooling coil 7 arranged between the inlet 3 and the blower 5 in the main duct 2, a temperature sensor 6 sensing a temperature of fluid discharged from the outlet 4, a bypass duct 8 making an inlet 9 communicate with the main duct 2 in a lower part side than the cooling coil 7 and making an outlet 10 communicate with the main duct 2 in an upper part side than the cooling coil 7, and a hot gas coil 11 arranged in the bypass duct 8. An intake side of the bypass duct 8 is closed so as to freely be opened and closed by a gate valve 12, and an opening of the gate valve 2 is controlled by a positioner 13 on the basis of the fluid temperature sensed by the temperature sensor 6. COPYRIGHT: (C)2009,JPO&INPIT