MACRO INSPECTION DEVICE, AND MACRO INSPECTION METHOD

PROBLEM TO BE SOLVED: To easily detect flatness of a surface of an inspection object with high sensitivity. SOLUTION: This macro inspection device 100 includes: a stage 1 for mounting an inspection object 2 thereon; a light source 5 emitting light to an upper surface of the inspection object from an...

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Bibliographic Details
Main Authors UDA MITSURU, KOHAYASE ATSUSHI
Format Patent
LanguageEnglish
Published 25.06.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PROBLEM TO BE SOLVED: To easily detect flatness of a surface of an inspection object with high sensitivity. SOLUTION: This macro inspection device 100 includes: a stage 1 for mounting an inspection object 2 thereon; a light source 5 emitting light to an upper surface of the inspection object from an optionally-selected angular direction with respect to the upper surface; and a line sensor 9 arranged in a selected angular direction with respect to the inspection object to adjust the optical axis to an edge of a region on the upper surface irradiated with the light source, and receiving light reflected from the edge of the region on the upper surface of the inspection object. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070318735