SAMPLE MAKING APPARATUS FOR THREE-DIMENSIONAL STRUCTURE OBSERVATION, ELECTRON MICROSCOPE, AND ITS METHOD

• Main Authors: KAKIBAYASHI HIROSHI, TAKAGUCHI MASANARI, NAKAMURA KUNIYASU, TOKIDA RURIKO
• Format: Patent
• Language: English
• Published: 04.06.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a sample making apparatus for an electron microscope, the electron microscope, and its method for observing the three-dimensional structure of a desired part in a minutely processed semiconductor device. SOLUTION: A dicer is used for processing a sample piece 10, and...