SAMPLE MAKING APPARATUS FOR THREE-DIMENSIONAL STRUCTURE OBSERVATION, ELECTRON MICROSCOPE, AND ITS METHOD

PROBLEM TO BE SOLVED: To provide a sample making apparatus for an electron microscope, the electron microscope, and its method for observing the three-dimensional structure of a desired part in a minutely processed semiconductor device. SOLUTION: A dicer is used for processing a sample piece 10, and...

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Bibliographic Details
Main Authors KAKIBAYASHI HIROSHI, TAKAGUCHI MASANARI, NAKAMURA KUNIYASU, TOKIDA RURIKO
Format Patent
LanguageEnglish
Published 04.06.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a sample making apparatus for an electron microscope, the electron microscope, and its method for observing the three-dimensional structure of a desired part in a minutely processed semiconductor device. SOLUTION: A dicer is used for processing a sample piece 10, and focused ion beam processing is used for cutting a part to be observed on the sample piece into a protruding shape. The sample piece 10 is fixed to a single-axis full-direction tilting sample holder with the central axis of the protrusion 11 aligned with the axis Z of the tilted sample. TEM images formed of high-angle scattered electrons are used as projection images, and reconstitution is performed. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20090051471