THIN FILM COATER
PROBLEM TO BE SOLVED: To provide a thin film coater attaining uniform coating of a thin film having a film thickness of approximately 50-200 nm. SOLUTION: The thin film coater is provided with a coating roll for coating a surface of a conveyed web-like base material to be coated with a coating film...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
04.06.2009
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a thin film coater attaining uniform coating of a thin film having a film thickness of approximately 50-200 nm. SOLUTION: The thin film coater is provided with a coating roll for coating a surface of a conveyed web-like base material to be coated with a coating film of a coating liquid, and is provided with at least a reverse roll reverse-rotated in an opposite direction to a traveling direction of the base material to be coated while abutting on the surface portion of the coating film coated by the coating roll, removing the excessive coating liquid while leveling the surface of the coating film and making it to the thin film. COPYRIGHT: (C)2009,JPO&INPIT |
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Bibliography: | Application Number: JP20070298942 |