PHOTODETECTOR

PROBLEM TO BE SOLVED: To provide a high-speed, high-sensitivity surface incident photodiode. SOLUTION: An optical signal is made incident on a light absorbing layer in an oblique direction by having its optical path changed using an inclined-plane reflective part to increase an effective absorption...

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Bibliographic Details
Main Author RI EIKON
Format Patent
LanguageEnglish
Published 28.05.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a high-speed, high-sensitivity surface incident photodiode. SOLUTION: An optical signal is made incident on a light absorbing layer in an oblique direction by having its optical path changed using an inclined-plane reflective part to increase an effective absorption layer thickness, thereby sensitivity is made high. Further, a diffraction grating or photonic crystal reflection portion on a photodetection portion reflects the optical signal in the direction opposite to the incident direction to make the sensitivity higher without increasing a photodetection portion area. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070286887