REPLICA DIFFRACTION GRATING

• Main Authors: YONEZAWA YOSHIO, SASAI HIROYUKI, NAGANO TETSUYA
• Format: Patent
• Language: English
• Published: 30.04.2009
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

PROBLEM TO BE SOLVED: To provide a replica diffraction grating that improves the characteristics for environmental resistance by reducing the generation of stray light due to entering of light to the inside of a substrate. SOLUTION: In this replica diffraction grating 10, an aluminum film 14 is formed on the surface of a grating groove of a master diffraction grating 12, after the aluminum film 14, and a float glass substrate 15 are made to closely adhere to each other via an adhesive 16, the float glass substrate 15 is separated from the master diffraction grating 12, and the aluminum film 14 is reversed and bonded to the float glass substrate 15, to form a grating surface. In the replica diffraction grating 10, the thickness of the aluminum film 14 is made larger than the depth of the grating groove. Thus, the whole of the grating surface of the replica diffraction grating 10 is covered with the aluminum film 14, having enough thickness so that the generation of stray light due to infiltration of light to the inside of the replica diffraction grating 10 is reduced and the characteristics of the environmental resistance are improved. COPYRIGHT: (C)2009,JPO&INPIT