MANUFACTURING METHOD AND MANUFACTURING APPARATUS FOR SIO POWDER

PROBLEM TO BE SOLVED: To provide a method and an apparatus for efficiently manufacturing SiO powder in a size of not less than 0.1 μm with high purity. SOLUTION: The method for manufacturing SiO powder includes steps of (a) generating SiO gas under reduced pressure and (b) precipitating the SiO gas...

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Bibliographic Details
Main Authors NAGAI TORU, ITO WATARU, TOKUMARU SHINJI, KONDO JIRO
Format Patent
LanguageEnglish
Published 16.04.2009
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Summary:PROBLEM TO BE SOLVED: To provide a method and an apparatus for efficiently manufacturing SiO powder in a size of not less than 0.1 μm with high purity. SOLUTION: The method for manufacturing SiO powder includes steps of (a) generating SiO gas under reduced pressure and (b) precipitating the SiO gas into SiO powder, wherein the step (b) includes transporting the SiO gas through a plurality of flow passages to a precipitation section for precipitating SiO powder and joining the flow passages in the precipitation section to solidify particles by allowing the SiO gas streams to collide each other. The supersaturation degree of the SiO gas in the precipitation section is not less than 10. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070249881