SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

• Main Authors: MURAI HIROSHI, AZUMA MASAHIKO
• Format: Patent
• Language: English
• Published: 09.04.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To suppress diffusion of electric charges accumulated in ONO films onto bit lines or to reduce contact resistance between the bit lines and plug metal. SOLUTION: A semiconductor device has bit lines 30 provided in a semiconductor substrate 10, first ONO films 20 provided on a s...