PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT AND METHOD FOR MANUFACTURING PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT

• Main Authors: SHIRONITA SHINJI, EBIGASE TAKASHI, SHIMIZU HIDEKI
• Format: Patent
• Language: English
• Published: 05.03.2009
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION

PROBLEM TO BE SOLVED: To increase an amount of displacement in an piezoelectric/electrostrictive element. SOLUTION: A piezoelectric/electrostrictive element 1 has a two-layer structure in which a lower layer electrode film 112, a lower layer piezoelectric/electrostrictive film 116, an inner layer electrode film 118, an upper piezoelectric/electrostrictive film 120, and an upper electrode film 114 are laminated, in this order, on a thin part 104 of a base 102. In the piezoelectric/electrostrictive element 1, the thin part 104 and a laminate 108 are curved and oscilated by applying a driving signal between an outer layer electrode film 110 and the inner layer electrode film 118. The piezoelectric/electrostriction film 116 and 120 has thickness distribution in which thickness becomes thick continuously from a center part of a curvature oscillation region 182, which serves as a stomach in a curvature primary mode, toward an end of the curvature oscillation region 182, which serves as a joint in the curvature primary mode, along the latitudinal direction of the curvature oscillation region 182. COPYRIGHT: (C)2009,JPO&INPIT