TITANIUM NITRIDE-STRIPPING LIQUID, AND METHOD FOR STRIPPING TITANIUM NITRIDE COATING FILM

PROBLEM TO BE SOLVED: To provide a titanium nitride-stripping liquid for stripping a titanium nitride coating film, the titanium nitride-stripping liquid being capable of stripping a titanium nitride coating film without affecting an insulating layer. SOLUTION: The titanium nitride-stripping liquid...

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Bibliographic Details
Main Authors HARAGUCHI TAKAYUKI, ETO TAKAHIRO, KUMAZAWA AKIRA
Format Patent
LanguageEnglish
Published 26.02.2009
Subjects
ADHESIVES
BASIC ELECTRIC ELEMENTS
CHEMISTRY
DYES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
PAINTS
POLISHES
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a titanium nitride-stripping liquid for stripping a titanium nitride coating film, the titanium nitride-stripping liquid being capable of stripping a titanium nitride coating film without affecting an insulating layer. SOLUTION: The titanium nitride-stripping liquid includes hydrofluoric acid, hydrogen peroxide and a water-soluble organic solvent, and the water-soluble organic solvent includes a polyhydric alcohol or an alkyl ether. According to the present invention, since the titanium nitride-stripping liquid includes glycol ether, corrosion to the insulating layer by the titanium nitride-stripping liquid is prevented when stripping the titanium nitride coating film. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20080144933