REPLICA DIFFRACTION GRATING AND MANUFACTURING METHOD THEREOF

• Main Author: YONEZAWA YOSHIO
• Format: Patent
• Language: English
• Published: 12.02.2009
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

PROBLEM TO BE SOLVED: To provide a replica diffraction grating capable of suppressing a decrease in processing precision of a grating surface and a decrease in reflection factor of a gold thin film, and a manufacturing method thereof. SOLUTION: After the gold thin film 21 of about 0.2 μm in film thickness is formed by vacuum deposition on a grating surface of a master diffraction grating 12, a first aluminum thin film 22 of about 0.01 μm in film thickness is formed by vacuum deposition on the gold thin film 21. Then the master diffraction grating 12 is taken out of a vacuum vapor-deposition chamber and exposed to the atmosphere to form an oxide film on a surface of the first aluminum thin film 22, and then the master diffraction grating 12 is put back in the vacuum vapor-deposition chamber again to form a second aluminum thin film 24 of about 2 μm in film thickness. Then a float glass substrate 25 coated with an adhesive 26 is pressed against the master diffraction grating 12 and then peeled off to bond the metal thin film 21 and aluminum thin films 22 and 24 which have their surfaces sectioned in a saw-tooth shape to the float glass substrate 25 with the adhesive 26 interposed therebetween, thereby manufacturing the replica diffraction grating 10. COPYRIGHT: (C)2009,JPO&INPIT