MANUFACTURING METHOD OF MAGNETIC HEAD, MAGNETIC HEAD, AND MAGNETIC RECORDING AND REPRODUCING DEVICE

• Main Author: INUKAI KAZUAKI
• Format: Patent
• Language: English
• Published: 22.01.2009
• Subjects: GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; PHYSICS; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

PROBLEM TO BE SOLVED: To form a main magnetic pole of a magnetic head of a magnetic recording and reproducing device with high accuracy. SOLUTION: A hard mask layer is formed on an insulating layer and a pattern in a shape corresponding to the outline of a main magnetic pole layer is formed on the hard mask layer. Then a resist layer is formed, and a resist pattern is formed inside the outline patterned on the hard mask layer in a shape corresponding to the outline of a main magnetic pole auxiliary layer. Then the insulating layer is etched using the patterned resist as a mask to form a second groove corresponding to the outline of the main magnetic pole auxiliary layer. Then the resist pattern is removed. Then the patterned hard mask is used as a mask to form a first groove corresponding to the outline of the main magnetic pole layer on the insulating layer. After the hard mask layer is removed, a ferromagnetic body is deposited in the first and second grooves by a plating method to form the main magnetic pole and main magnetic pole auxiliary layer together at a time, and then the main magnetic pole layer is flattened by CMP. COPYRIGHT: (C)2009,JPO&INPIT