METHOD OF MANUFACTURING MOLD FOR FORMING FILM, METHOD OF FORMING MAIN POLE LAYER IN PERPENDICULAR MAGNETIC RECORDING HEAD, AND PERPENDICULAR MAGNETIC RECORDING HEAD

• Main Authors: DOVEK MORIS, LEE JIUN-TING, HUANG SHIWEN
• Format: Patent
• Language: English
• Published: 08.01.2009
• Subjects: GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; PHYSICS; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording head with improved writability and a sharper neck transition having a main pole layer including a yoke that has vertical sidewalls and a write pole that has inclined sidewalls. SOLUTION: An insulation layer mold frame has a negative differential bevel angle dBA by employing a two-mask process. A first photoresist layer is patterned and etched to form a rectangular trench 37 in an insulation layer 31 formed of alumina. A second photoresist layer is patterned into a yoke shape opening that is partially superimposed over the rectangular trench 37. After a second RIE process, the yoke opening adjoins the trench 37 at a neck transition point along each long trench side. The volume of a magnetic material in the yoke adjacent to the neck is thereby maximized. The dimension control of the main pole layer can be conducted independently of ABS positioning errors. COPYRIGHT: (C)2009,JPO&INPIT