POSITION CONTROL DEVICE

PROBLEM TO BE SOLVED: To provide a position control device which is enabled to grasp an optimal parameter in advance by modeling a nonlinear spring property and therefore can perform highly precise position control with a simple adjustment work. SOLUTION: The position control device which performs p...

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Bibliographic Details
Main Authors OTSUKA JIRO, TANAKA YOSHIHARU, MASUDA IKURO
Format Patent
LanguageEnglish
Published 11.12.2008
Subjects
CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS
CONTROLLING
CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRICITY
GENERATION
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Summary:PROBLEM TO BE SOLVED: To provide a position control device which is enabled to grasp an optimal parameter in advance by modeling a nonlinear spring property and therefore can perform highly precise position control with a simple adjustment work. SOLUTION: The position control device which performs position control of a stage 4 which is guided by a roll guide 5, corrects thrust force of a stage in a control system by friction force obtained from a nonlinear spring property of the roll guide based on speed of the stage 4. It has a feedback control system which performs position control of the stage based on a position deviation between a command position and an actual position, and the friction force of the roll guide 5 is incorporated into this control system as a feedforward gain. The nonlinear spring property of the roll guide 5 is composed by using a brush model. COPYRIGHT: (C)2009,JPO&INPIT
Bibliography:Application Number: JP20070143126