MANUFACTURING METHOD OF PATTERNED MEDIUM
PROBLEM TO BE SOLVED: To provide a manufacturing method of a patterned medium which can efficiently fill magnetic substance deep into fine pores, even if a sputtering method is employed for filling the magnetic substance into the fine pores of a porous layer, has very few impurities and has a magnet...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
20.11.2008
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a manufacturing method of a patterned medium which can efficiently fill magnetic substance deep into fine pores, even if a sputtering method is employed for filling the magnetic substance into the fine pores of a porous layer, has very few impurities and has a magnetic substance layer of a high coercive force. SOLUTION: In the method of manufacturing the patterned medium including a substrate, the porous layer formed on the substrate and having a plurality of fine pores approximately vertical to the substrate surface, and the magnetic substance filled in the fine pores by the sputtering method, ion radiation is carried out with respect to the vicinity of the fine pores when filling the fine pores with the magnetic substance by the sputtering method to promote migration of sputter atoms. COPYRIGHT: (C)2009,JPO&INPIT |
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Bibliography: | Application Number: JP20070125316 |