COOLING DEVICE AND SEMICONDUCTOR INSPECTION DEVICE

• Main Author: NOMI KAZUHIRO
• Format: Patent
• Language: English
• Published: 06.11.2008
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; COLD ROOMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEAT PUMP SYSTEMS; HEATING; ICE-BOXES; LIGHTING; LIQUEFACTION SOLIDIFICATION OF GASES; MANUFACTURE OR STORAGE OF ICE; MECHANICAL ENGINEERING; REFRIGERATION MACHINES, PLANTS OR SYSTEMS; REFRIGERATION OR COOLING; REFRIGERATORS; SEMICONDUCTOR DEVICES; WEAPONS

PROBLEM TO BE SOLVED: To provide a cooling device having a short rising time and capable of stably cooling a cooled object, and to provide a semiconductor inspection device using the cooling device. SOLUTION: This cooling device includes a pump for circulating a refrigerant, a main line for circulating the refrigerant to a cooled object through a refrigerating machine, a bypass line branched from the main line, and joining to the main line while bypassing the refrigerating machine, a temperature detecting means for detecting a temperature of the refrigerant, a flow rate adjusting means for adjusting flow rates of the main line and the bypass line, and a control means for controlling the flow rate adjusting means. The control means controls the flow rates of the main line and the bypass line after branching, corresponding to the temperature detected by the temperature detecting means, and controls the flow rates of the main line and the bypass line so that the total flow rate of the flow rate of the main line and the flow rate of the bypass line after branching is substantially kept constant. COPYRIGHT: (C)2009,JPO&INPIT