METHOD FOR DETECTING ELECTRICAL CONTACT BETWEEN PROBE AND MICROSCOPE SAMPLE AND ITS APPARATUS

• Main Authors: SHIMIZU TETSUO, KATSUTA TEIJI, NIIHORI SHUNICHIRO, KASHIMURA KENTA, KIKUCHI ASUKA, NAITO YASUHISA, ANDO ATSUSHI, KATOGI KATSUYA, KAWAKAMI TATSUO, YOKOSUKA SHUNTARO, OHIRA TSUNEKIMI
• Format: Patent
• Language: English
• Published: 09.10.2008
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a method for efficiently, speedily, and accurately bringing a probe and a microscope sample into electrical contact in a micro manipulation apparatus and provide its apparatus. SOLUTION: In the micro manipulation apparatus for performing electrical fine operations on a microscope sample while observing a scanning electron microscope image, with AC voltage applied to the probe, needle contact is formed with an operation pint in the surface of the microscope sample at a tip of the probe within a field of view of a scanning electron microscope to recognize changes in the scanning electron microscope image due to effects of the AC voltage and detect electrical contact between the probe and the microscope sample. COPYRIGHT: (C)2009,JPO&INPIT