PLASMA TREATMENT EQUIPMENT

PROBLEM TO BE SOLVED: To provide plasma treatment equipment having a function for removing a deposit adhering on the outer peripheral section of the rear of a body to be treated, having a high throughput and reducing a device cost. SOLUTION: A deposit removing unit in a system removing the deposit o...

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Bibliographic Details
Main Authors IZAWA MASARU, YOKOGAWA KATANOBU, KOBAYASHI HIROYUKI, MAEDA KENJI
Format Patent
LanguageEnglish
Published 25.09.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide plasma treatment equipment having a function for removing a deposit adhering on the outer peripheral section of the rear of a body to be treated, having a high throughput and reducing a device cost. SOLUTION: A deposit removing unit in a system removing the deposit on the outer periphery of the rear of the body to be treated by a pulse laser irradiation is connected to an atmospheric-air side carrying chamber for the plasma treatment equipment. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: JP20070060369