MANUFACTURING METHOD OF OPTICAL ELEMENT

• Main Author: KUROTAKE HIROYUKI
• Format: Patent
• Language: English
• Published: 18.09.2008
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To solve the problem that it is difficult to position a polarization inversion region and an optical waveguide of a conventional optical element. SOLUTION: The manufacturing method of the optical element includes the stages of: forming a first electrode 103 on a first surface of a ferroelectric substrate 101; forming the polarization inversion region 106 by applying an electric field; forming a predetermined resist pattern 111 on the first surface and dry-etching a resist opening portion thereof; removing the resist pattern 111 and first electrode 103; sticking the first surface on a support substrate 102; and forming an optical waveguide 109 by polishing and trench-processing the surface on the opposite side from the first surface, so that the positioning can easily be performed. COPYRIGHT: (C)2008,JPO&INPIT