CARBONYL FLUORIDE HAVING REDUCED CONTENT OF HYDROGEN FLUORIDE AND METHOD FOR PRODUCING THE SAME
PROBLEM TO BE SOLVED: To provide a carbonyl fluoride having a reduced content of hydrogen fluoride and a method for producing the same. SOLUTION: The carbonyl fluoride has a hydrogen fluoride content of 0.1-50 vol.ppm. The method for producing the carbonyl fluoride comprises steps of preparing a met...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
18.09.2008
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a carbonyl fluoride having a reduced content of hydrogen fluoride and a method for producing the same. SOLUTION: The carbonyl fluoride has a hydrogen fluoride content of 0.1-50 vol.ppm. The method for producing the carbonyl fluoride comprises steps of preparing a metal fluoride deoxidizer by bringing at least one metal fluoride selected from the group consisting of an alkali metal fluoride and an alkaline earth metal fluoride into contact with a pretreatment gas containing at least one member selected from the group consisting of carbonyl fluoride and fluorine, and bringing a carbonyl fluoride containing not less than 0.001 vol% and less than 0.5 vol% of hydrogen fluoride into contact with the metal fluoride deoxidizer. COPYRIGHT: (C)2008,JPO&INPIT |
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Bibliography: | Application Number: JP20080098297 |