PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND PRINTER
PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of improving both of initial displacement amount and dulability. SOLUTION: The piezoelectric element 100 includes a substrate 1; a lower electrode 4 formed above the substrate; piezoelectric layer 6 formed above the lower electrode and...
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Main Author | |
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Format | Patent |
Language | English |
Published |
11.09.2008
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of improving both of initial displacement amount and dulability. SOLUTION: The piezoelectric element 100 includes a substrate 1; a lower electrode 4 formed above the substrate; piezoelectric layer 6 formed above the lower electrode and consisting of a perovskite oxide represented by the formula of ABO3, wherein A contains Pb and B contains Zr and Ti; and an upper electrode 7 formed above the piezoelectric layer. The piezoelectric layer comprises at least two regions 61, 62 where Zr and Zr composition for Ti are different. COPYRIGHT: (C)2008,JPO&INPIT |
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Bibliography: | Application Number: JP20070048974 |