SUBSTRATE HOLDER AND LASER ANNEALING APPARATUS

PROBLEM TO BE SOLVED: To provide a substrate holder which can protect the rear face of a substrate against damages due to foreign matters, and to provide a laser annealing apparatus equipped with the same. SOLUTION: The substrate holder 10 comprises a substrate holding plate 11, a plurality of first...

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Bibliographic Details
Main Author YOSHIOKA HIDEO
Format Patent
LanguageEnglish
Published 11.09.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a substrate holder which can protect the rear face of a substrate against damages due to foreign matters, and to provide a laser annealing apparatus equipped with the same. SOLUTION: The substrate holder 10 comprises a substrate holding plate 11, a plurality of first suction holes 18 formed in the substrate holding plate 11 to suck a substrate 15, and a plurality of lift-up pins 13 which are disposed in the substrate holding plate 11 to lift up the substrate 15 above the top face 11A of the substrate holding plate 11. On the top face 11A of the substrate holding plate 11, first projecting portions 12, each having a first through-hole 23 continuous with the corresponding first suction hole 18, are formed in correspondence to the positions of the first suction holes 18. The substrate 15 is supported by the first projecting portions 12. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: JP20070045679