CLEANING SHEET, TRANSPORTING MEMBER HAVING CLEANING FUNCTION AND METHOD FOR CLEANING SUBSTRATE TREATING APPARATUS

PROBLEM TO BE SOLVED: To provide a cleaning sheet excellent in both of transportability in a substrate treating apparatus and the removability of foreign materials attached in the apparatus, a transporting member having a cleaning function and formed by using the cleaning sheet, and a method for cle...

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Bibliographic Details
Main Authors SHOJI AKIRA, MURATA AKIHISA
Format Patent
LanguageEnglish
Published 04.09.2008
Subjects
ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE
ADHESIVES
BASIC ELECTRIC ELEMENTS
CHEMISTRY
DYES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL
PAINTS
POLISHES
SEMICONDUCTOR DEVICES
USE OF MATERIALS AS ADHESIVES
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Summary:PROBLEM TO BE SOLVED: To provide a cleaning sheet excellent in both of transportability in a substrate treating apparatus and the removability of foreign materials attached in the apparatus, a transporting member having a cleaning function and formed by using the cleaning sheet, and a method for cleaning a substrate treating apparatus by using the above items. SOLUTION: The cleaning sheet has a cleaning layer on one surface of a supporting substrate and a tacky adhesive layer on the other surface of the supporting substrate opposite to the surface having the cleaning layer, wherein the adhesive layer contains a layered silicate. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: JP20070039631