CLEANING SHEET, TRANSPORTING MEMBER HAVING CLEANING FUNCTION AND METHOD FOR CLEANING SUBSTRATE TREATING APPARATUS
PROBLEM TO BE SOLVED: To provide a cleaning sheet excellent in both of transportability in a substrate treating apparatus and the removability of foreign materials attached in the apparatus, a transporting member having a cleaning function and formed by using the cleaning sheet, and a method for cle...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
04.09.2008
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a cleaning sheet excellent in both of transportability in a substrate treating apparatus and the removability of foreign materials attached in the apparatus, a transporting member having a cleaning function and formed by using the cleaning sheet, and a method for cleaning a substrate treating apparatus by using the above items. SOLUTION: The cleaning sheet has a cleaning layer on one surface of a supporting substrate and a tacky adhesive layer on the other surface of the supporting substrate opposite to the surface having the cleaning layer, wherein the adhesive layer contains a layered silicate. COPYRIGHT: (C)2008,JPO&INPIT |
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Bibliography: | Application Number: JP20070039631 |