SUBSTRATE CARRIER ENCLOSURE
PROBLEM TO BE SOLVED: To provide a portable substrate carrier enclosure. SOLUTION: The carrier enclosure has a carrier support, a displaceable cover, spacers between the support and the cover, a gas inlet, and a removable lid. There are also provided an assembly and a process for depositing an air-s...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
10.07.2008
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a portable substrate carrier enclosure. SOLUTION: The carrier enclosure has a carrier support, a displaceable cover, spacers between the support and the cover, a gas inlet, and a removable lid. There are also provided an assembly and a process for depositing an air-sensitive material onto a substrate using the portable substrate carrier enclosure. COPYRIGHT: (C)2008,JPO&INPIT |
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Bibliography: | Application Number: JP20070204249 |