STAGE STRUCTURE FOR SURFACE TREATMENT

• Main Author: SAITO NAOMICHI
• Format: Patent
• Language: English
• Published: 03.07.2008
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a stage structure for surface treatment, enabling a stage to suck a workpiece via a cover member put on the stage. SOLUTION: First and second suction holes 56, 66 are provided on a stage body 20X. A cover member 23 is put on the surface of the stage body 20X to seal...