METHOD FOR CUTTING BRITTLE MATERIAL

PROBLEM TO BE SOLVED: To provide a method for cutting a brittle material using laser beams which can easily divide a substrate by suppressing the adhesion between cracked surfaces without pollution with a cooling fluid. SOLUTION: The brittle material cutting method includes a process in which the br...

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Bibliographic Details
Main Authors HOTTA TAKAFUMI, JIBIKI SATOSHI
Format Patent
LanguageEnglish
Published 26.06.2008
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Summary:PROBLEM TO BE SOLVED: To provide a method for cutting a brittle material using laser beams which can easily divide a substrate by suppressing the adhesion between cracked surfaces without pollution with a cooling fluid. SOLUTION: The brittle material cutting method includes a process in which the brittle material with an initial crack formed in advance is irradiated with laser beams while the laser beams are moved relatively with the initial crack as a starting point to form a local heating part on the surface of the brittle material, a process in which a secondary crack is developed from the initial crack by quenching the local heating part by spraying a cooling fluid on it to form a cutting line, a process in which the brittle material is divided by applying mechanical force along the cutting line, and a process in which the adhesion of the secondary crack is prevented after the cutting line is formed. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: JP20060331285