DEVICE FOR SUPPORTING SUBSTRATE AND DEVICE FOR PROCESSING SUBSTRATE PROVIDED WITH SAME

• Main Author: KURATA YASUHIRO
• Format: Patent
• Language: English
• Published: 05.06.2008
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a device for supporting a substrate adapted to obviate a processing-failure and an operation-failure of a substrate caused by particles created by friction between constituent members, and to provide a device for processing a substrate provided with the device for supporting a substrate. SOLUTION: When a spin chuck 500 is to support a substrate W, a second linking member 702 and a first linking member 701 are operated and a force to provide lowering together with rotation (an arrow M3) acts on a supporting member 600a. Thereby, a tapered shaft surface 611 of the supporting member 600a abuts a tapered hole surface HT of a spin base 700, thereby causing an interspace between a lift shaft 605 and a member-inserting hole H to be closed by the tapered shaft surface 611. When a substrate W is to be released from the spin chuck 500, the second linking member 702 and the first linking member 701 are operated and a force to provide lifting together with rotation (an arrow N3) acts on the supporting member 600a. Thereby, the tapered shaft surface 611 of the supporting member 600a is lifted while rotated, entailing removal of the tapered shaft surface 611 of the supporting member 600a from the tapered hole surface HT of a spin base 700. COPYRIGHT: (C)2008,JPO&INPIT