MANUFACTURING METHOD OF MAGNETIC HEAD SLIDER

PROBLEM TO BE SOLVED: To solve such a problem that when dry etching is performed after grinding a row bar or a floating plane of a magnetic head slider, conductive smear caused by plastic flow in grinding can be eliminated, while a damage region is formed at an end plane of an intermediate layer of...

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Bibliographic Details
Main Authors YASUI HIROTO, SEKI TAKATERU, WATANABE KATSURO, MIYATA KAZUFUMI, MATSUZAKI TETSUYA
Format Patent
LanguageEnglish
Published 06.03.2008
Subjects
ELECTRICITY
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To solve such a problem that when dry etching is performed after grinding a row bar or a floating plane of a magnetic head slider, conductive smear caused by plastic flow in grinding can be eliminated, while a damage region is formed at an end plane of an intermediate layer of a magneto-resistance effect film, and output is reduced or dielectric strength is reduced. SOLUTION: Cleaning by ion beam irradiation is performed to eliminate conductive smear after grinding a row bar or a floating plane of a magnetic head slider 10, oxygen exposure is performed to recover a damage region 14a formed at an end plane of an intermediate layer 14 of a magneto-resistance effect film 5 by ion beam irradiation , after that, floating plane protection films 7, 8 are formed, successively, rail processing is performed. When the above processing is performed for the row bar, the row bar is cut and separated into individual head slider. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: JP20060228862