TWO-DIMENSIONAL MAPPING ANALYZER

PROBLEM TO BE SOLVED: To obtain an accurate two-dimensional mapping image by correcting the positional shift of an electron beam in a line scanning system. SOLUTION: One of two-dimensional images acquired by scanning a predetermined region of the surface of a sample by the electron beam in a beam sc...

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Bibliographic Details
Main Authors MITAMURA SHIGEHIRO, OGOSHI AKIRA
Format Patent
LanguageEnglish
Published 21.02.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To obtain an accurate two-dimensional mapping image by correcting the positional shift of an electron beam in a line scanning system. SOLUTION: One of two-dimensional images acquired by scanning a predetermined region of the surface of a sample by the electron beam in a beam scanning part is preliminarily stored as a reference image and the beam scanning part is driven at every preset number of line scanning lines to acquire a two-dimensional image. The two-dimensional image is compared with the reference image stored in a reference image memory part to calculate the shift quantity of the electron beam. The position of the electron beam is corrected by a deflection lens on the basis of the calculated shift quantity. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: JP20060210429