METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
PROBLEM TO BE SOLVED: To provide a technology for preventing adhesion of resin at an undesirable position during the molding step, in the fabrication process of a semiconductor device. SOLUTION: Clearance between the parent body 1 of a substrate and a pot holder is eliminated by making a guide pin 8...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
27.12.2007
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a technology for preventing adhesion of resin at an undesirable position during the molding step, in the fabrication process of a semiconductor device. SOLUTION: Clearance between the parent body 1 of a substrate and a pot holder is eliminated by making a guide pin 8A7 raised from below a guide hole GH, and sliding the guide hole GH to copy the inclined surface IS of the guide pin 8A7 formed by forward tapering, thereby sliding the parent body 1 of a substrate on a lower cavity base toward the pot holder. Molding step is performed under the situation where the gap no longer exists. COPYRIGHT: (C)2008,JPO&INPIT |
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Bibliography: | Application Number: JP20060162094 |