EJECTOR COLLISION AVOIDANCE SYSTEM

PROBLEM TO BE SOLVED: To provide an ejector collision avoidance system for preventing a collision between a wafer table and an ejector when the wafer table is moved out of a set range due to an error of software and an error of data entry. SOLUTION: The present invention is characterized by includin...

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Bibliographic Details
Main Authors CHOI HAN HYOUN, LEE MIN HYUNG
Format Patent
LanguageEnglish
Published 25.10.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide an ejector collision avoidance system for preventing a collision between a wafer table and an ejector when the wafer table is moved out of a set range due to an error of software and an error of data entry. SOLUTION: The present invention is characterized by including the wafer table for placing a wafer unit having chips arranged thereon, a table driving assembly for driving the wafer table, the ejector which is disposed in the wafer table and supports the chip of the wafer unit when picking up the chip of the wafer unit, and a safety unit which is disposed in the wafer table and stops the table driving assembly when the wafer table comes into contact with the ejector. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: JP20060332364