APPARATUS FOR CLEANING/DRYING HARD DISK SUBSTRATE AND ITS SUBSTRATE CONVEYING MEANS

• Main Authors: IIHAMA TAKAO, MEGURO AKIRA, ANEZAKI MASAHIRO
• Format: Patent
• Language: English
• Published: 25.10.2007
• Subjects: CLEANING; CLEANING IN GENERAL; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; PERFORMING OPERATIONS; PHYSICS; PREVENTION OF FOULING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To improve conveying efficiency of substrate conveyance, and to reduce the occurrence of foreign matters such as dust. SOLUTION: In conveying substrate holding means 13 to 15, a primary side substrate holding means 14 disposed in a supply side 6, a secondary side substrate holding means 14 disposed in a more discharge side 11 than the primary substrate holding means 13, and an intermediate substrate holding means 15 disposed between the primary and secondary side substrate holding means 13 and 14 are integrally arranged. A length X1 between the primary side substrate holding means 15 and the secondary side substrate holding means 14, a length X2 between the intermediate substrate holding means 15 and the secondary side substrate holding means 14, a conveying length X3 between the supply side 6 and the substrate receiving/taking-out position L1 of a substrate cleaning index table 8, a conveying length X4 between the substrate receiving/taking-out position L1 of the substrate cleaning index table 8 and the substrate receiving/taking-out position M1 of the substrate drying index table 10, and a conveying length X5 between the substrate receiving/taking-out position M1 of the substrate drying index table 10 and the discharge side 11 are set equal to one another. The substrate D is conveyed in synchronization without any delays. COPYRIGHT: (C)2008,JPO&INPIT