PIEZOELECTRIC RESONATOR DEVICE AND METHOD OF MANUFACTURING SAME

• Main Author: ARIMURA HIROYUKI
• Format: Patent
• Language: English
• Published: 18.10.2007
• Subjects: BASIC ELECTRIC ELEMENTS; BASIC ELECTRONIC CIRCUITRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a piezoelectric resonator device which copes with ultra-compactness and an ultra-low height and the hermetic seal performance of which is enhanced. SOLUTION: A step difference part 101 is formed inside a package 1 with a dam part is formed, and electrode pads 12, 13 are formed on the upper side of the part 101. A crystal resonator plate 2 formed with an exciting electrode is electro-mechanically joined with on the electrode pads 12, 13 by a conductive joining member S. A lid 3 for hermetically sealing the package comprises a flat metallic plate, and the shape of its plane view is nearly similarly configured with the shape of the plane view of the package. Covar is used, for example, for the mother member of the lid 3. The surface of the covar is formed of a nickel layer. Further, a metallic minute particle paste joining member 31 is formed at the joining part of the lid with the dam of the package, and the lid and the package are joined. COPYRIGHT: (C)2008,JPO&INPIT