PLASMA GENERATOR AND WORKPIECE PROCESSING DEVICE USING IT

• Main Authors: YOSHIDA KAZUHIRO, MATSUUCHI HIDETAKA, HAYASHI HIROSHI
• Format: Patent
• Language: English
• Published: 11.10.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a plasma generator used in processing a workpiece such as reforming of a substrate in which a plurality of plasma generating nozzles are installed on a waveguide and uniform plasma is obtained in coping with a plurality of the workpieces to be treated or works with large area. SOLUTION: In a waveguide 10 in which the cross-section crossing at right angles the propagation direction F of microwave is formed in rectangle, the microwave energy becomes high at the central part of the cross-section and low as it goes further to the end part side, thereby, at least a part of the plasma generating nozzles 31 is arranged offset in the direction crossing the propagation direction of the microwave corresponding to the microwave energy to be received. Thereby, each plasma generating nozzle 31 can irradiate plasma with uniform energy regardless of the distance from the microwave generator 20, and uniformity can be obtained. COPYRIGHT: (C)2008,JPO&INPIT