METHOD FOR COATING HARD FILM HAVING LOW-FRICTION CHARACTERISTICS AND PEEL RESISTANCE, AND COATED MEMBER WITH THE HARD FILM

• Main Authors: TAKANO SHIGETO, MOTO AKIO, KANDA KAZUTAKA, GOTO KENICHI, TERAYAMA NOBUYUKI
• Format: Patent
• Language: English
• Published: 11.10.2007
• Subjects: BORING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MACHINE TOOLS; MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVINGMATERIAL; METAL-WORKING NOT OTHERWISE PROVIDED FOR; METALLURGY; PERFORMING OPERATIONS; PUNCHING METAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; TURNING; WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS ORPROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL

PROBLEM TO BE SOLVED: To provide a method for coating a hard film having low-friction characteristics, superior abrasion resistance and superior peel resistance, and to provide a member coated with such a hard film. SOLUTION: This coating method comprises the steps of: roughening the surface of a substrate 1; coating the roughened surface with a DLC film 2; and polishing the DLC film 2. Thus obtained DLC film 2 acquires improved peel resistance because a contact area between the DLC film 2 and the substrate 1 increases through roughening the surface of the substrate 1, and acquires the hard film having the low-friction characteristics through further polishing the DLC film 2. Alternatively, the hard film with high strength, peel resistance and low-friction characteristics can be obtained by the steps of: coating the surface of the substrate 1 with a diamond film; polishing the surface of the diamond film; then, coating the surface of the diamond film with the DLC film 2; and polishing the surface of the DLC film 2. COPYRIGHT: (C)2008,JPO&INPIT